东京理科大学以离子液体辅助干法蚀刻金属有机框架：成果发表于《通讯-材料》
建议频道：科学
首发/跟进：首发
拟稿时间：2026-11-10 12:05 PST
日本东京理科大学应用物理系Yumeng Zheng助理教授与Kentaro Kinoshita教授领导的研究提出一种加工金属有机框架的新方法。团队把离子液体填入框架孔隙，以减少后续干法蚀刻造成的损伤，研究发表于《通讯-材料》。
金属有机框架为多孔材料，被研究用于电子器件等领域，但其结构脆弱、成形加工困难。离子液体填充旨在在室温干法蚀刻过程中支撑孔隙结构。
论文题为离子液体辅助的金属有机框架室温干法蚀刻，数字对象标识为10.1038/s43246-026-01396-3。研究团队成员包括Koki Egawa。
Tokyo University of Science Team Uses Ionic Liquid to Assist Dry Etching of Metal-Organic Frameworks, Published in Communications Materials
Researchers led by Assistant Professor Yumeng Zheng and Professor Kentaro Kinoshita in the Department of Applied Physics at Tokyo University of Science in Japan have developed a method to process metal-organic frameworks. The team filled the framework pores with an ionic liquid to reduce damage during dry etching, and the study was published in Communications Materials.
Metal-organic frameworks are porous materials studied for uses including electronic devices, but their fragile structures make shaping difficult. The ionic liquid filling is intended to support the pore structure during room-temperature dry etching.
The paper is titled Ionic-liquid-assisted room-temperature dry etching of metal-organic frameworks, with digital object identifier 10.1038/s43246-026-01396-3. Team members included Koki Egawa.
来源： https://phys.org/news/2026-11-metalorganic-frameworks-easier-electronic-devices.html
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图片来源：Wikipedia/Wikimedia Commons 词条主图：Ionic liquid piston compressor
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